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  • Tungsten and Rhemium Heaters in Semiconductor MOCVD Device
  • Tungsten and Rhemium Heaters in Semiconductor MOCVD Device

Tungsten and Rhemium Heaters in Semiconductor MOCVD Device

We always adhere to the quality basis of self-produced refractory metal materials such as tungsten, molybdenum, tantalum and niobium, and have a complete set of high-precision material machining equipment such as EDM machines, grinding machines, milling machines and machining centers, and high-precision detection instruments such as video measuring instrument, height measuring device, roughness measuring instrument and three coordinate measuring machine.

Product Description


產(chǎn)品用途:

用作半導(dǎo)體MOCVD設(shè)備的部件。

Application:

 They are used as a component of semiconductor MOCVD system.

 

產(chǎn)品加工精度參數(shù)/Product Processing Accuracy Parameters

主要材質(zhì)Main Materials

加工范圍Processing

Range

尺寸精度Dimensional Accuracy

(mm)

形狀精度Shape Accuracy 

(mm)

位置精度Position Accuracy (mm)

光潔度Finish

(Ra, μm)

WRE

0.00-5.00

±0.003

0.01

0.005

0.2-0.4

W、RE

5.01-15.00

±0.005

0.015

0.006

0.4

W、RE

15.01-30

±0.008

0.02

0.007

0.4

WRE

30.01-100

±0.010

0.025

0.008

0.6

W、RE

>100

±0.0127

0.030

0.010

0.6

 


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